Ozone Delivery System 臭氧氣體系統

1. O3 Concentration: 350g/m3;
2. Flow Rate: Max27.5slm*4Channel@185g/m3(12.5wt%);
3. Integration: MFC, Pressure sensor, O3 Sensor, APC;
4. High O3 Performance and High Reliability;
5. O3 Output: Max360g/H Per Channel;
6. Channel: 1-4 Channels Available;
7. Design: Modular Design;
8. Communication: DB62 connector, DB37 connector，DB50 connector for multiple equipment vendors;
9. Certification: SEMI-S2, F47, S6;
10. Application: ALD, ASHER, SD, Clean

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Application: ALD, ASHER, SD, Clean