Dissolved Ozone Water System 臭氧水系統

1.DIO3 Concentration: Max150ppm
2.DIO3 Flow：1-60lpm(直排式)，1-20lpm(循环式)
3.O3 Mixer： High EFF Static Mixer and Degas system
4.Optional Mixer： Hollow Fiber Module
5.Ozone Generator： 1-14cells Ozone Generator;
6.Reclaim：Optional, Save UPW
7.Communication: Modbus TCP, RS485, Remote IO
8.Control mode: Remote and Local, Close Loop, Idle, Reclaim Mode;
8.COO: Low O2 and CO2 consumption, Reclaim Mode
9.Response: 5mins DIO3 concentration Ready; 
10.Safety Interlock Depend on the Hardware;
11.SEMI-S2, S6, F47；

<Flow Chart>

<Performance Chart>

 Application: Thin film, Diffusion, CMP, Wet Clean