Ozone Destruct 臭氧破壞器

1. O3 Con. : Max 350g/m3;
2. Flow Rate: Max 90slm;
3. Principle: Catalytic decomposition;
4. Inlet gas source: Pure ozone gas without water vapor or other impurities, otherwise it will cause catalyst failure;
5. Compact design;
6. Easy installation;
7. Double-shell design for personnel protection;
8. High-quality, ozone resistant materials

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 Application: CVD TEOS, ALD, MOVCD, Ashers, WET Benches