Ozone Generator 臭氧產生器

1. O3 Con.: Max420g/m3；
2. Flow Rate: 0.5-40slm;
3. Performance: 27.5 slm @ 12.5wt% / 305g/H;
4. Cell: 1-14 cells Available;
5. High Delivery O3 pressure;
6. High Purity Al2O3 Ceramic;
7. Full water-cooled cell and OSC Power module;
8. Optimized OSC Power Module, High Reliability;
9. Cooling Water: 9.5lpm for 14cell, very low thermal load;

<Performance Chart>

 Application: ALD, ASHER, SAVCD, Clean