1.Application:
API-452 Ozone Sensor works with a controller to monitor ozone concentration, and it is connected right after Ozone Generator. Normally API-452 feeds back monitor result to controller for close loop control purpose. It is used to maintain ozone concentration level and meet process requirement.
API-452 runs in-line service with gas full flow.
2.Process Flow:
API-452 sensor is installed next to Ozone Generator. It accepts clean ozone gas for concentration measurement only. When ozone is not requested from process chamber, it should be diverted to O3 destruct for safety and environment protection.
Application: CVD TEOS, ALD, MOVCD, Ashers, WET Benches
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